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Beiträge zur Technologieentwicklung für die Erzeugung von Airgap-Strukturen in Metallisierungssystemen in integrierten Schaltkreisen
Autor:in:
Dr.-Ing. Knut Schulze (Author)
Subject:
Electrotechnology
Category:
Doctoral Thesis / Dissertation , 2008 , Grade: 2
Price:
US$ 46.99
